TSMC Adopts Jordan Valley JVX 6200 for Copper Layer Metrology
2009年4月15日 - 1:01PM
PRニュース・ワイアー (英語)
MIGDAL HA'EMEK, ISRAEL, April 15 /PRNewswire/ -- Jordan Valley
Semiconductors LTD, a provider of semiconductor metrology
solutions, announced today that TSMC (TAIEX: 2330, NYSE: TSM), the
world's largest dedicated semiconductor foundry, has selected JVX
6200 X-ray metrology tool for measuring the thickness of thin film
copper layers in TSMC. The evaluation of potential technologies -
X-ray vs. opto-acoustic - "We found that X-ray reflectometry (XRR)
demonstrated the required capability. Among the evaluated X-ray
based tools, the JVX 6200 for its superior precision in the
sub-angstrom range and for its lower total cost of ownership" Isaac
Mazor, Jordan Valley's President and CEO commented, "We are pleased
and proud with the outcome of this evaluation. We see TSMC not only
as a valued strategic customer, but also as a technological leader.
TSMC's decision is recognition of XRR as the technology-of-choice
for copper layer thickness metrology in our products. We are
looking forward to continue supporting their metrology needs as
they evolve." About X-ray Reflectometry X-ray reflectometry is a
no-contact, non-distractive, surface-sensitive technique that
delivers precise and accurate characterization and metrology of
thin films and multi-layer stacks. The technique delivers
thickness, density and roughness data by analyzing the reflection
vs. angle, and interference patterns of X-rays that reflect off the
interfaces. XRR is capable of analyzing single and multiple thin
films layers from 1 to 500 nm thick. Jordan Valley's advanced XRR
technology allows measurements on production wafers and offers
superior throughput of over 30 WPH (17 points on 300mm wafer).
About TSMC Established in 1987, Taiwan Semiconductor Manufacturing
Company (TSMC) is the world's largest dedicated semiconductor
foundry. As the founder and leader of the dedicated foundry
business, TSMC has built its reputation on offering advanced wafer
production processes and unparalleled manufacturing efficiency.
From its inception, TSMC has consistently offered the foundry
segment's leading technologies and TSMC COMPATIBLE design services
to its customers. The company's total managed capacity exceeds 8
million 8-inch equivalent wafers in 2007, while its revenues
represent some 50% of the dedicated foundry segment in the
semiconductor industry. About Jordan Valley Jordan Valley
Semiconductors, Ltd. Is the leader of X-ray metrology for advanced
semiconductors fabs. We provide semiconductor metrology solutions
for thin films front end of line (FEOL) and back end of line (BEOL)
based on novel, rapid and non-destructive x-ray technology. We
offer a comprehensive family of solutions based on advanced X-Ray
Reflectivity (XRR), X-Ray Fluorescence (XRF), X-Ray Fluorescence
(XRF), Small-angle X-ray scattering (SAXS) and High Resolution
X-Ray Diffractometry (HR XRD). These tools are fully automated,
production ready, and ideal for both blanket and patterned wafers.
Jordan Valley's x-ray technology enables accurate and precise
characterization of all film types metals and dielectrics -
including single and multi-layer stacks, high k, metal gate, low k
materials. It is also used for strain engineering (SiGe, Si:C) and
is used for advanced processes control (