NuTool Announces Evaluation of Nanometrics Laser Profiler Technology for Copper Step Height Measurement
2004年2月17日 - 11:30PM
PRニュース・ワイアー (英語)
NuTool Announces Evaluation of Nanometrics Laser Profiler
Technology for Copper Step Height Measurement Partnership with
Nanometrics to Evaluate Integrated Metrology Solution for
Post-Plating Copper Step Height/Profile Measurement MILPITAS,
Calif., Feb. 17 /PRNewswire/ -- NuTool, Inc., a privately funded,
closely held semiconductor equipment company, today announced a
partnership with Nanometrics, Inc., to develop a method for
monitoring the planarity of plated copper films. Control of the
withindie range and the planarity of copper films deposited by
various electrochemical methods are becoming critical parameters
for the successful integration of