MYK Mykrolis Corp

Mykrolis's IntelliFlow(R) 3XP Qualified by Semiconductor Equipment Supplier Pressure-Insensitive MFC Is Process-Qualified for Next-Generation Etch Tools BILLERICA, Mass., May 16 /PRNewswire-FirstCall/ -- Mykrolis Corporation (NYSE:MYK), a leading supplier of components and subsystems to the semiconductor industry, today announced that a major semiconductor equipment supplier based in the United States has selected the IntelliFlow 3XP mass flow controller (MFC) as a standard option for its etch tools. IntelliFlow 3XP is Mykrolis's 3rd generation of IntelliFlow Digital MFCs and uniquely integrates several Mykrolis gas delivery core technologies into a single, modular solution for advanced semiconductor processing. According to Stuart Tison, VP and General Manager of Mykrolis's Gas Delivery business, "IntelliFlow 3XP offers the latest, most advanced technology available for gas flow control. IntelliFlow 3XP has successfully demonstrated superior performance in the field for advanced wafer processing and is receiving favorable reviews from OEMs and IC manufacturers around the world. IntelliFlow 3XP truly delivers on Mykrolis's commitment to innovative, leading-edge technology that enables our customers' most advanced processes." IntelliFlow 3XP provides superior performance over previous MFC technology for key attributes such as accuracy, response time, control range, pressure insensitivity, and programmability to enable superior yield on next generation etch, deposition and thermal processes. IntelliFlow 3XP also offers a unique, modular solution by providing options for integrated pressure transducers, displays, and UHP contamination control which can lower gas system cost and size while simultaneously improving quality, reducing maintenance, and increasing tool uptime. IntelliFlow 3XP will continue to incorporate industry leading IntelliFlow software for user configurable gases and ranges, diagnostics, and graphical user interfaces. About Mykrolis Mykrolis Corporation, based in Billerica, Massachusetts, is a worldwide developer, manufacturer and supplier of liquid and gas delivery systems, components and consumables used to precisely measure, deliver, control and purify the process liquids, gases and chemicals, as well as the deionized water, photoresists and vacuum systems utilized in the semiconductor manufacturing process. In addition, the Company's products are used to manufacture a range of other products, such as flat panel displays, high purity chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic cables. For more information, visit http://www.mykrolis.com/. IntelliFlow and Mykrolis are registered trademarks of Mykrolis. Mykrolis logo is a trademark of Mykrolis Corporation. CONTACT: Craig Lazinsky Mykrolis Corporation Tel. 978-436-6743 DATASOURCE: Mykrolis Corporation CONTACT: Craig Lazinsky of Mykrolis Corporation, +1-978-436-6743, Web site: http://www.mykrolis.com/

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