SEMATECH and Cabot Microelectronics Collaborate to Accelerate Chemical Mechanical Planarization Technology for Future Devices
2013年2月14日 - 8:00PM
ビジネスワイヤ（英語）
SEMATECH today announced that Cabot Microelectronics Corporation
(Nasdaq: CCMP), the world’s leading supplier of chemical mechanical
planarization (CMP) polishing slurries and a growing CMP pad
supplier to the semiconductor industry, has joined its Front End
Processes (FEP) program and will collaborate with SEMATECH to
develop advanced solutions for emerging CMP applications.
“SEMATECH provides Cabot Microelectronics with excellent process
capability to help identify and demonstrate emerging applications
for CMP consumables,” stated Ananth Naman, Cabot Microelectronics’
Vice President of Research and Development. “We expect this
collaboration to help enable Cabot Microelectronics support our
customers’ emerging CMP requirements.”
As semiconductor device sizes shrink, new materials are
introduced, and higher yields are targeted. Achieving wafer scale
planarity through CMP has become increasingly challenging. These
issues are expected to continue to become more challenging in the
context of low power technologies.
“SEMATECH is pleased to welcome Cabot Microelectronics as a
program member,” said Paul Kirsch, SEMATECH’s director of Front End
Processes. “Cabot Microelectronics’ CMP processing solutions will
complement our own device and process expertise. We will work
together to develop practical, manufacturable solutions to address
the emerging needs of advanced transistor technologies.”
The goal of SEMATECH’s FEP program is to enable novel
leading-edge materials, processes, structural modules and
electrical and physical characterization methods to support the
continued scaling of logic and memory applications.
About Cabot Microelectronics Corporation
Cabot Microelectronics Corporation, headquartered in Aurora,
Illinois, is the world's leading supplier of CMP polishing slurries
and a growing CMP pad supplier to the semiconductor industry. The
company's products play a critical role in the production of
advanced semiconductor devices, enabling the manufacture of
smaller, faster and more complex devices by its customers. The
company's mission is to create value by developing reliable and
innovative solutions, through close customer collaboration, that
solve today's challenges and help enable tomorrow's technology.
Since becoming an independent public company in 2000, the company
has grown to approximately 1,050 employees on a global basis. For
more information about Cabot Microelectronics Corporation, visit
www.cabotcmp.com.
About SEMATECH
For over 25 years, SEMATECH®, the international consortium of
leading semiconductor device, equipment, and materials
manufacturers, has set global direction, enabled flexible
collaboration, and bridged strategic R&D to manufacturing.
Through our unwavering commitment to foster collaboration across
the nanoelectronics industry, we help our members and partners
address critical industry transitions, drive technical consensus,
pull research into the industry mainstream, improve manufacturing
productivity, and reduce risk and time to market. Information about
SEMATECH can be found at www.sematech.org.
Twitter: www.twitter.com/sematechnews
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