Toshiba’s Newly Developed Fully Isolated N-channel LDMOS Realizes High HBM Robustness & High Breakdown Voltage to Negative ...
2017年6月2日 - 9:20AM
ビジネスワイヤ(英語)
Toshiba (TOKYO:6502) has developed fully isolated N-channel
LDMOS technology that overcomes the trade-off between breakdown
voltage to negative bias (BVnb) and HBM robustness, a measure of
resistance to electrostatic discharge (ESD). Details of this
achievement were reported on June 1 at ISPSD 2017 (International
Symposium on Power Semiconductor Devices and ICs 2017), an
IEEE-sponsored international conference on power semiconductors,
held in Japan.
Recent years have seen an increasing need for automotive analog
ICs and Power ICs with fully isolated Nch-LDMOS and high BVnb,
especially devices supporting voltages of 40V and over. Achieving a
higher BVnb has until now required a trade-off with securing HBM
robustness, and achieving both has required a bigger die, in order
to electrically isolate substrates and the inside of the die. This
has impeded progress in miniaturization and cost reduction.
Furthermore, since HBM robustness is a parameter that is difficult
to estimate without actually fabricating devices, a new parameter
for estimating HBM robustness was strongly required.
In order to overcome the trade-off between HBM robustness and
BVnb while minimizing die size, Toshiba conducted 2D TCAD
simulations of numerous parameters and found that current flow
concentration, which corresponds to the peak value of the electric
field under the drain region (EUD), depends on HBM robustness. As a
result of utilizing EUD to optimize die characteristics by
adjusting various parameters, Toshiba successfully improved HBM
robustness while achieving a rated voltage of 25 to 96V. This also
realized a die size reduction of 46% for 80V fully isolated
Nch-LDMOS products, satisfying HBM +/-4kV, a measure of HBM
robustness.
Toshiba has produced prototypes of BiCD-0.13G3 process-based
devices using the new technology and plans to start mass production
in fiscal year 2018. The company is committed to contributing to
the realization of lighter, more efficient automobiles and
improving their performance by expanding the range of products
offering fully isolated Nch-LDMOS.
*1 HBM (Human Body Model): a model for characterizing the
susceptibility of electronic devices to ESD, based on ESD from the
human body.
*2 Fully isolated N-channel LDMOS: A laterally diffused MOS
transistor with a structure that reduces the electric field between
the drain and gate by fully isolating them electrically.
*3 EUD (Electrical field under Drain region): Electric field
strength observed under the drain source.
*4 BiCD-0.13G3 process technology: One of Toshiba’s power
semiconductor process technologies. Users can select the process
that suits their application: BiCD-0.13G1/G2/G3, mainly for
automotive devices; CD-0.13G3, mainly for motor control drivers;
and CD-0.13G1/G2, mainly for power management IC.
About Toshiba
Toshiba Corporation, a Fortune Global 500 company, channels
world-class capabilities in advanced electronic and electrical
product and systems into three focus business fields: Energy that
sustains everyday life, that is cleaner and safer; Infrastructure
that sustains quality of life; and Storage that sustains the
advanced information society. Guided by the principles of The Basic
Commitment of the Toshiba Group, “Committed to People, Committed to
the Future”, Toshiba promotes global operations and is contributing
to the realization of a world where generations to come can live
better lives.
Founded in Tokyo in 1875, today’s Toshiba is at the heart of a
global network of 550 consolidated companies employing 188,000
people worldwide, with annual sales surpassing 5.6 trillion yen
(US$50 billion). (As of March 31, 2016.)
To find out more about Toshiba, visit
www.toshiba.co.jp/index.htm
View source
version on businesswire.com: http://www.businesswire.com/news/home/20170601006734/en/
Toshiba CorporationStorage & Electronic Devices Solutions
CompanyKoichi Tanaka, +81-3-3457-3576Public Relations &
Investor Relations GroupBusiness Planning
Divisionsemicon-NR-mailbox@ml.toshiba.co.jp